High temperature behaviour of magnetron sputtered nanocrystalline titanium aluminium nitride coatings

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dc.contributor.author Yeung, Wing en_US
dc.contributor.author Attard, D en_US
dc.contributor.author Wuhrer, Ric en_US
dc.date.accessioned 2009-12-21T03:51:22Z
dc.date.available 2009-12-21T03:51:22Z
dc.date.issued 2006 en_US
dc.identifier 2006004823 en_US
dc.identifier.citation Yeung Wing, Wuhrer Richard, and Attard D 2006, 'High temperature behaviour of magnetron sputtered nanocrystalline titanium aluminium nitride coatings', Institute of Materials Engineering, Australasia, vol. 30, pp. 77-84. en_US
dc.identifier.issn 1447-6738 en_US
dc.identifier.other C1 en_US
dc.identifier.uri http://hdl.handle.net/10453/5700
dc.description.abstract This paper is to study the thermal stability of nanocrystalline ternary nitride coatings at elevated temperatures. Nanocrystalline titanium aluminium nitride coatings were produced by reactive magnetron co-sputtering on glass substrates and AISI H13 tool steel substrates with nitrogen pressures of 0.4 and 0.65 mTorr (0.053 and 0.086 Pa) respectively. Heat treatment was applied to the coatings at temperatures up to 1000C. It was found that an unexpected grain refinement occurred in the coatings deposited at 0.4 mTorr nitrogen pressure after the heat treatment. a stronger development of TiN(TiAIN (200) component was also evident at temperatures above 800C. With a finer and densified grain struicture, the hardness of the coatings increased substantially from ~1700 to 2300HV. en_US
dc.publisher Institute of Materials Engineering, Australasia en_US
dc.subject Thin films. en
dc.subject Magnetrons. en
dc.title High temperature behaviour of magnetron sputtered nanocrystalline titanium aluminium nitride coatings en_US
dc.parent Materials Forum en_US
dc.journal.volume 30 en_US
dc.journal.number en_US
dc.publocation Melbourne VIC, Australia en_US
dc.identifier.startpage 77 en_US
dc.identifier.endpage 84 en_US
dc.cauo.name INT en_US
dc.conference Verified OK en_US
dc.for 091202 en_US
dc.personcode 910582 en_US
dc.personcode 880536 en_US
dc.personcode 0000028496 en_US
dc.percentage 50 en_US
dc.classification.name Composite and Hybrid Materials en_US
dc.classification.type FOR-08 en_US
dc.description.keywords TiAIN coatings, thin films, Ternary nitride coatings, magnetron sputtering en_US


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