Islam Hedayetul; Wuhrer Richard; Berkahn Mark; Cornell Bruce; Valenzuela Stella; Martin Donald
(The Institute of Materials engineering Australasia Ltd, 2008)
Titanium nitride thin films are widely used in biomedical implants because of thier biocompatibility, good mechanical properties and high corrosion resistance. Titanium nitride (TiN) thin films on silicon and glass substrates ...