Kondyurin A; Gan Bee; Bilek Marcela; Mckenzie David; Mizuno K; Wuhrer Richard
(Elsevier Science Bv, 2008)
Plasma immersion ion implantation (PIII), using bias voltages of 5, 10, 15 and 20 kV in an argon plasma and fluences in the range of 2 x 10(14)-2 x 10(16) ions/cm(2), was applied to 100 nm polystyrene films coated on silicon ...