Lim Sunnie; Mcculloch D; Bilek Marcela; Mckenzie David; Du Plessis J; Swain Michael; Wuhrer Richard
(Elsevier Sequoia, 2006)
The effect of plasma immersion ion implantation on the indentation hardness as measured by contact pressure and composition of cathodic arc
deposited TiN thin films was investigated. According to Auger electron spectroscopy ...