Size Dependent Optical Properties Of Si Quantum Dots In Si-Rich Nitride/Si(3)N(4) Superlattice Synthesized By Magnetron Sputtering

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Size Dependent Optical Properties Of Si Quantum Dots In Si-Rich Nitride/Si(3)N(4) Superlattice Synthesized By Magnetron Sputtering

So Yh; Gentle Angus; A Huang; Sj Conibeer; G Green
URI: http://hdl.handle.net/10453/14580
Date: 2011

Abstract:

A spectroscopic ellipsometry compatible approach is reported for the optical study of Si quantum dots (QDs) in Si-rich nitride/silicon nitride (SRN/Si(3)N(4)) superlattice, which based on Tauc-Lorentz model and Bruggeman effective medium approximation. I

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