Godlewski Marek; Kopalko Krzysztof; Godlewski M; Ivanov V Yu; Paskowicz W; Lusakowska Elzbieta; Szczerbakow A; Domagala J; Phillips Matthew
(Wiley, 2007)
PACS 68.37.Hk, 68.37.Ps, 68.55.-a, 78.60.Hk, 81.05.Dz, 81.15.Gh
We report successful growth of thin films of ZnO by atomic layer epitaxy (ALE). Properties of the ZnO
films grown by ALE on GaN/sapphire are described in ...