Browsing by Author "Steven, Randolph"

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Browsing by Author "Steven, Randolph"

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  • Steven, Randolph; Toth, Milos; Cullen, Jared; Chandler, Olive; Lobo, Charlene (American Institute of Physics, 2011)
    Electron beam induced etching (EBIE) is a high resolution, direct write, chemical dry etch process in which surface-adsorbed precursor molecules are activated by an electron beam. We show that nanoscale EBIE is rate limited ...