Li J T; Toth Milos; Tileli V; Dunn K A; Lobo Charlene; Thiel Bradley
(Amer Inst Physics, 2008)
Environmental scanning electron microscopy (ESEM) was used to perform electron beam induced deposition (EBID) using a WF(6) precursor. The deposits consist of WO(3) nanocrystals embedded in an amorphous matrix. Oxide ...